R3: High-pressure science and deep Earth's material

[R3-13] Characteristics and problems of quantitative chemical analysis in ATEM part 2

*Kiyoshi Fujino¹, Hiroaki Ohfuji¹ (1. GRC, Ehime Univ.)

Keywords:analytical TEM, quantitative chemical analysis, k-factor

In part 1 of the characteristics and problems of quantitative chemical analysis in ATEM, the analysis using the calibration line of Cliff-Lorimer’s k-factor was discussed. In part 2, this time, the analysis using the calculation of absorption effect in k-factor is discussed. Also, how the smallest measured area can be reduced by reducing the irradiation electron density in the X-ray measurements is discussed.