*Naoki Kato¹, Shujirou Dohta¹, Tetsuya Akagi¹, Wataru Kobayashi¹, Kazuhisa Ito² (1. Okayama University of Science, 2. Shibaura Institute of Technology)

*Wei Zhong¹, Jia Wang¹, Fanghua Liu¹ (1. Jiangsu University of Science and Technology)

Alex Poon¹, *Rocky Mai¹, Yeong Choi¹, Sandy Lee¹, Pai-Hsueh Yang¹, Gaurav Keswani¹, Atsushi Hara², Koichi Sakata² (1. Nikon Research Corporation of America, 2. Nikon Corporation)

Michele Gabrio Antonelli¹, *Pierluigi Beomonte Zobel¹, Francesco Durante¹, Terenziano Raparelli² (1. Department of Industrial and Information Engineering and Economics - University of L'Aquila, 2. Department of Mechanical and Aerospace Engineering - Politecnico di Toino)

*Kei Mikami¹, Kotaro Tadano¹ (1. Tokyo Institute of Technology)