The 10th JFPS International Symposium on Fluid Power 2017

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Oral Presentation

Pneumatics

[1B06-10] P2 (Pneumatic Cylinder & Position Control )

Wed. Oct 25, 2017 2:20 PM - 3:40 PM Room B (ACROS Fukuoka)

Chair:Yasuhiro Hayakawa(National Institute of Technology, Nara College), Yukio Kawakami(Shibaura Institute of Technology)

2:52 PM - 3:08 PM

[1B08] PNEUMATIC ACTUATOR FOR PRECISION MOTION CONTROL APPLICATIONS

Alex Poon1, *Rocky Mai1, Yeong Choi1, Sandy Lee1, Pai-Hsueh Yang1, Gaurav Keswani1, Atsushi Hara2, Koichi Sakata2 (1. Nikon Research Corporation of America, 2. Nikon Corporation)

Keywords:Pneumatic actuator, Precision control, Friction, Piston, Valve