PDF ダウンロード スケジュール 2 11:25 〜 12:05 [2D30] IMPROVEMENT OF THE MAINTAINABILITY OF LOW-COST GAS/LIQUID SERVO VALVE *Shota Harada1, Tetsuya Akagi1, Shujiro Dohta1, Wataru Kobayashi1 (1. Okayama University of Science) キーワード:Servo valve using buckled tubes, Gas/liquid valve, Maintainability