[G] 高温プロセス・物性・熱力学

[7] The orientation relationship between Si₃N₄ and Si in polysilicon

*Pengting Li¹, Shuhui Tong¹, Yi Tan¹ (1. Dalian University of Technology)

キーワード：Silicon、Orientation relationship、Directional solidification

We studied the removal process of Si₃N₄ particles during the directional solidification porcess of multicrystalline Si under inductive smelting. The orientation relationship between them is revealed.