[S6] S6.New Materials Science on Nanoscale Structures and Functions of Crystal Defect Cores, IV(2)

[S6.17] Three-dimensional atomic structure analysis of SrTiO₃ Σ5 grain boundary by STEM depth sectioning

*Takahiro Imata¹, Ryo Ishikawa², Kazuaki Kawahara², Shun Sasano², Yuichi Ikuhara^2,3, Naoya Shibata^2,3 (1. The University of Tokyo, 2. The University of Tokyo, 3. Japan Fine Ceramics Center)

Keywords:STEM、3次元原子構造、深さ断層法

大収束角STEMを用いた深さ断層法により，チタン酸ストロンチウム(SrTiO₃)Σ5粒界の観察を行い，取得した焦点位置の異なるSTEM明視野像から3次元表面/裏面構造の再構成および試料厚みの推定を行った．