[S9] S9.ワイドギャップ結晶の材料学と高温プロセッシングV

[S9.4] Solution Growth of AlN single crystal in Fe-Cr flux

*李 森¹、安達 正芳¹、大塚 誠¹、福山 博之¹ (1. 東北大)

キーワード：AlN single crystal、Solution growth

AlN single crystals were epitaxially grown on an AlN bulk substrate by a solution growth method using Fe-Cr flux. XRCs, SEM, SIMS were performed to characterize the quality of synthesized AlN.