[P] P168~P180

[P170] Superimposed Irradiation Effect on Ripple Structure Formation on Al₂O₃ Surface by Ion Beam Sputtering

*Shotaro Akamine¹, Naoto Oishi¹, Noriko Nitta² (1. Kochi univercity of Technology, 2. Kochi univercity of Technology)

Keywords:Al₂O₃、ripple、ion beam、Sputtering、Superimposed Irradiation

イオンビームをAl₂O₃に重畳照射した際のリップル構造について調べた。