*Takenori KATO1, Mi-jung JEEN2, Deung-lyong CHO3, Kei SATO1
(1.Center for Chronological Research, Nagoya University, 2.Center for Research Facilities, Pusan National University, 3.Geological Mapping Department, Korea Institute of Geoscience and Mineral Resources)
Keywords:electron probe microanalysis (EPMA), quantitative analysis, mass attenuation coefficients, matrix correction
Mass attenuation coefficients (m.a.c.s) are important factors of accuracy in quantitative electron probe microanalysis (EPMA). New m.a.c.s are calculated from the latest version of two datasets[1][2] for Z = 1 - 92. The combination of two datasets solves the problems within them, such as spurious discontinuity and unnatural increase at high-energy sides of absorption edges. New m.a.c.s improve accuracy including geological applications.[1] Henke B.L., Gullikson, E.M. and Davis, J.C. (1993) At. Data Nucl. Data Tables, 54, 181 - 342.[2] Hubbel J.H. and Seltzer S.M. (1995) NISTIR, 5632, pp. 116.