[P-CG18] Future missions and instrumentation for space and planetary science

[PCG18-12] Development of an ultra-lightweight X-ray telescope using MEMS technology

*Hiromi Morishita¹, Yuichiro Ezoe ¹, Kumi Ishikawa ¹, Masaki Numazawa¹, Daiki Ishi¹, Aoto Fukushima¹, Tomoki Uchino¹, Sae Sakuda¹, Ayata Inagaki¹, Yoko Ueda¹, Luna Sekiguchi¹, Yukine Tsuji¹, Takatoshi Murakawa¹, Kazuhisa Mitsuda², Kohei Morishita³, Kazuo Nakajima⁴, Yoshiaki Kanamori⁴ (1.Tokyo Metropolitan University, 2.National Astronomical Observatory of Japan, 3.Kyushu University, 4.Tohoku University)

Keywords:MEMS, GEO-X, X-ray telescope

We have been developing an ultra-lightweight Wolter type-I X-ray telescope fabricated with micro electro mechanical systems (MEMS) technologies for GEO-X (GEOspace X-ray Imager) mission. GEO-X will aim for global imaging of the Earth's magnetosphere using X-rays. The MEMS X-ray telescope utilizes sidewalls of micropores formed by deep reactive ion etching on a 4-inch Si wafers for X-ray mirrors. The sidewalls are smoothed by high-temperature hydrogen annealing and chemical mechanical polishing processes. The Si wafers are plastically deformed into a spherical shape to focus X-rays. Sidewalls are coated with Pt using the atomic layer deposition method. Finally, two wafers are assembled to form a Wolter I-type telescope. In this talk we show our recent development to smooth the sidewalls in order to achieve an angular resolution of 10 arcmin required in the GEO-X mission and describe environmental test results.