5:15 PM - 7:15 PM
[MTT39-P03] Performance Evaluation of Stability of a New MEMS Microbarometer
Keywords:MEMS barometric pressure sensor, Infrasound, Microbaromus, Microbarometer, Quartz Microbarometer
Introduction
When an array observation facility with a distance between sensors that matches one wavelength (approximately 1.7 to 2 km) of atmospheric pulsation with a period of 0.2 Hz is used to determine the source of pulsation, a microbarometer (waveform amplitude 1/1 million of 1 atm) is necessary for array analysis of atmospheric pulsation to enable detection of the air pulsation phenomenon. Last year we succeeded in developing a new inexpensive, high-performance microbarometer and had the opportunity to test it. We have successfully developed and tested this new inexpensive, high-performance microbarometer, and have a good prospect of its technology and cost for detecting the source of atmospheric pulsation and for future disaster prevention use in infrastructure sounding observations. Observations were made with the cooperation of the general public in Atsugi and Isehara.
Stability Evaluation of the New Microbarometer
The stability of Quartz microbarometer is said to be better than ±8 Pa/year in its catalog. Through 11 months of parallel observations at Jishukan Secondary School, the difference was +1.3 Pa/11 months based on the Quartz microbarometer. In the parallel observation at Mitomi Giken, the difference was +7 Pa/11 months based on Quartz microbarometer. This paper reports on the stability of the new microbarometer in more detail.
When an array observation facility with a distance between sensors that matches one wavelength (approximately 1.7 to 2 km) of atmospheric pulsation with a period of 0.2 Hz is used to determine the source of pulsation, a microbarometer (waveform amplitude 1/1 million of 1 atm) is necessary for array analysis of atmospheric pulsation to enable detection of the air pulsation phenomenon. Last year we succeeded in developing a new inexpensive, high-performance microbarometer and had the opportunity to test it. We have successfully developed and tested this new inexpensive, high-performance microbarometer, and have a good prospect of its technology and cost for detecting the source of atmospheric pulsation and for future disaster prevention use in infrastructure sounding observations. Observations were made with the cooperation of the general public in Atsugi and Isehara.
Stability Evaluation of the New Microbarometer
The stability of Quartz microbarometer is said to be better than ±8 Pa/year in its catalog. Through 11 months of parallel observations at Jishukan Secondary School, the difference was +1.3 Pa/11 months based on the Quartz microbarometer. In the parallel observation at Mitomi Giken, the difference was +7 Pa/11 months based on Quartz microbarometer. This paper reports on the stability of the new microbarometer in more detail.