Presentation information

General Session

General Session » J-13 AI application

[4O3-GS-13] AI application: Project management and product development

Fri. Jun 12, 2020 2:00 PM - 3:40 PM Room O (jsai2020online-15)

座長:有賀康顕(Arm Treasure Data)

2:40 PM - 3:00 PM

[4O3-GS-13-03] A Comprehensive Yield Monitoring System for High-mix Low-volume Semiconductor Manufacturing

〇Shun Hirao1, Kouta Nakata1 (1. Toshiba Corporation)

Keywords:Clustering, Semiconductor manufacturing, Factory IoT

Data-driven productivity improvement is a hot topic in semiconductor manufacturing. Intensive data analyses are conducted to realize yield enhancement utilizing big-data in semiconductor fabrications. We focus on the yield analysis for high-mix low-volume (HMLV) production which is demanded for diversity of products. In HMLV fabrications, the more kinds of products they produces, the more time the engineers have to spend on analyses, which leads to decreasing of productivity. In this paper, we proposed a comprehensive yield monitoring system for HMLV production. The system provides the improvement of automated classification and the efficient view across the different product groups.

Authentication for paper PDF access

A password is required to view paper PDFs. If you are a registered participant, please log on the site from Participant Log In.
You could view the PDF with entering the PDF viewing password bellow.