^○Ryosuke Sakamoto¹, Masanori Hayase¹ (Tokyo University of Science¹)

^○Suguru Sakugawa¹, Masanori Hayase¹ (Tokyo University of Science¹)

^○Shoichiro Ogata¹, Naritaka Kobayashi¹, Chikako Takatoh², Shohei Shima², Akira Fukunaga², Hitoshi Asakawa³, Takeshi Fukuma^1,3 (Dept. of Eng., Kanazawa Univ¹, Ebara Corporation², Bio-AFM Research Center, Kanazawa Univ³)

^○Eiichi Kondoh¹, Ryota Gomi¹, Yukihiro Tamegai¹, Mitsuhiro Watanabe¹, Lianhua Jin¹ (Univ. Yamanashi¹)

^○（M2）Kohei Shima¹, Hideharu Shimizu¹, Takeshi Momose¹, Yukihiro Shimogaki¹ (The Univ. of Tokyo¹)

^○Yoshiyuki Kikuchi^1,2, Akira Wada¹, Seiji Samukawa^1,3 (IFS, Tohoku Univ¹, Tokyo Electron Development Inst.², WPI-AIMR, Tohoku Univ³)

^○Masaru Sato¹, Mayumi Takeyama¹, Atsushi Noya¹ (Kitami Inst. of Technol.¹)

^○Junya Ikeda¹ (FUJITSU LABORATORIES LTD.¹)

^○Tsuyoshi Kanki¹, Junya Ikeda¹, Shoichi Suda¹, Yasushi Kobayashi¹, Yoshihiro Nakata¹, Tomoji Nakamura¹ (FUJITSU LABORATORIES LTD.¹)

^○Mayu Aoki¹, Kazuyuki Hozawa¹, Yuko Hanaoka¹, Kenichi Takeda¹ (Association of Super-Advanced Electronics Technologies¹)

^○Akihiro Noriki¹, Kang-Wook Lee², Jicheol Bea², Takafumi Fukushima², Tetsu Tanaka^1,3, Mitsumasa Koyanagi² (Dept. of Bioengineering and Robotics, Tohoku Univ.¹, New Industry Creation Hatchery Center (NICHe), Tohoku Univ.², Dept. of Biomedical Engineering, Tohoku Univ.³)