[27a-A6-1~11] 6.2 Carbon-based thin films

[27a-A6-1] Evaluation of Boron Delta-Doped Diamond (111) Structures

^○（B）Takuma Minamiyama¹, Norio Tokuda^1,2,3, Masahiko Ogura^2,3, Satoshi Yamasaki^2,3, Takao Inokuma¹ (Kanazawa Univ.¹, AIST², JST,CREST³)

Keywords:δドーピング、ダイヤモンド