[27a-F1-1~9] 6.5 Surface physics and vacuum

[27a-F1-2] Experimental verification of the unified Si oxidation reaction model (6): Behavior of metastable oxygen on Si(111) surfaces

^○（B）Kiwamu Nishimoto¹, Jiayi Tang¹, Shuichi Ogawa¹, Akitaka Yoshigoe², Shinji Ishizuka³, Daiki Watanabe¹, Yuden Teraoka², Yuji Takakuwa¹ (Tohoku Univ.¹, JAEA², Nagaoka Univ. Tech.³)

Keywords:リアルタイム光電子、準安定酸素分子、Si酸化