[27a-PA5-1~9] 1.7 Instrumentation and measurement

[27a-PA5-9] A study about the small defect and small particle detection on thin film by Glancing method of Multi-angular Images by the cross Correlation

^○Masashi Yamamoto¹, Mitunori Tone², Hiroshi Kubota¹ (Kumamoto Univ. GSST¹, Kumamoto Univ.²)

Keywords:欠陥検査