[27a-PB2-1~24] 6.3 Oxide-based electronics

[27a-PB2-14] Lithography Process using TiO₂ Hybrid Thin Films

^○Kimiaki Uemura¹, Mizuki Nakano¹, Ryo Ozaki¹, Atsushi Maeda¹, Atsunori Matsuda² (OPUCT¹, TUT²)

Keywords:光触媒