[27a-PB2-1~24] 6.3 Oxide-based electronics

[27a-PB2-24] A study on the preparation of tantalum- and tungsten-doped vanadium oxide films as a detector material for infrared sensors

Naoyuki Ishibashi¹, Kazuhiro Saito¹, Ryosuke Watanabe¹, ^○Yoji Saito¹ (Seikei Univ.¹)

Keywords:ボロメータ、赤外線センサ、酸化バナジウム