[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-11] Growth of ZnO thin films on PET substrate by Reactive DC sputtering Technique

^○Ryota Kimura¹, Hiroshi Nishigaki¹, Noriyuki Hasuike¹, Jung Gon Kim¹, Hiroshi Yamamoto¹, Kouhei Idehara¹, Toshiyuki Issiki¹, Kenji Kisoda², Hiroshi Harima¹ (Kyoto Inst.of Tech¹, Wakayama Univ²)

Keywords:酸化亜鉛、透明導電膜、スパッタリング