[27p-A2-11] Inspection of metallization process by differential reflection spectral measurements at plasma edges
Keywords:配線膜、プラズマ端、反射分光
Presentation information
Regular sessions(Oral presentation)
03. Optics » 3.4 Optical measurement
[27p-A2-1~14] 3.4 Optical measurement
Wed. Mar 27, 2013 1:30 PM - 5:15 PM A2 (K1 B1-B102)