Non-destructive Measurement Method of Grating Groove Profile using Scatterometry (2)

Presentation information

Regular sessions(Oral presentation)

03. Optics » 3.4 Optical measurement

Wed. Mar 27, 2013 1:30 PM - 5:15 PM A2 (K1 B1-B102)

^○Takenori Hirose¹, Shigeru Matsui², Yoshisada Ebata² (Hitachi, Ltd.¹, Hitachi High-Tech²)

Keywords:grating、scatterometry