[27p-G10-1~6] Semiconductor modeling and simulation: today and tomorrow

[27p-G10-6] Quantum Hydrodynamic Models for Carrier Transport Simulation in Scaled MOSFETs

^○Shohiro Sho¹, Shinji Odanaka² (Osaka Univ.¹, Osaka Univ. Cybermedia Center²)

Keywords:半導体、シミュレーション、量子エネルギー輸送モデル