[27p-G12-1~48] 17. Nanocarbon Technology

[27p-G12-43] Fabrication of extremely-scaled graphene single-electron transistors by using He ion beam milling technology

Nima Kalhor¹, Shuojin Hang¹, ^○（M1）Takuya Iwasaki², Zakaria Moktadir¹, Stuart Boden¹, Manoharan Muruganathan², Hiroshi Mizuta^1,2 (Univ. of Southampton¹, JAIST²)

Keywords:グラフェン、単電子トランジスタ、ヘリウムイオンビームミリング