The 60th JSAP Spring Meeting,2013

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Symposium(Oral presentation)

Symposium » ・Present and future of CMOS/MEMS integration

[27p-G9-1~5] Present and future of CMOS/MEMS integration

Wed. Mar 27, 2013 1:30 PM - 4:15 PM G9 (B5 2F-2203)

[27p-G9-3] ▲Towards Sensors Implementation and Integration Using the CMOS MEMS Platform

Chuanwei Wang1, Chih-Ming Sun1, Ming-Han Tsai1, Yu-Chia Liu1, ○Weileun Fang1 (National Tsing Hua Univ.1)

Keywords:MEMS、CMOS-MEMS