[27p-PA4-1~17] 8. Plasma Electronics

[27p-PA4-10] Study on discharge properties of MgO films deposited by Ar/N₂ sputtering gas (8.6)

Hikaru Nakayama¹, ^○Takayuki Misu², Masahiko Murakami¹, Miki Goto¹, Toshihiko Arai¹ (Kanagawa Inst.¹, Kanagawa Inst.²)

Keywords:MgO、二次電子放出係数