[27p-PB5-1~13] 13.6 Silicon devices / Integration technology

[27p-PB5-10] Fabrication of Ge/Si core/shell nanowires for thermoelectric properties

^○Tomoya Shoji¹, Tetsuo Kodera^1,2, Tomohiro Noguchi¹, Kouichi Usami¹, Yukio Kawano¹, Shunri Oda¹ (QNERC, Tokyo Tech.¹, PRESTO-JST²)

Keywords:ナノワイヤ、nanowires、Ge/Si