[28a-A10-8] Production of large area plasma
Keywords:大面積プラズマ源、ECR プラズマ源、VHFプラズマ源
Presentation information
Regular sessions(Oral presentation)
08. Plasma Electronics » Invited lecture in Plasma Electronics session
[28a-A10-8~9] Invited lecture in Plasma Electronics session
Thu. Mar 28, 2013 11:00 AM - 12:00 PM A10 (K1 12F-1201)