[28a-A2-1~9] 3.4 Optical measurement

[28a-A2-9] Single-path type point diffraction interferometer for precise optical alignment of soft X-ray imaging system.

^○Mitsunori Toyoda¹, Kentaro Uchida¹, Mihiro Yanagihara¹ (IMRAM, Tohoku Univ.¹)

Keywords:干渉計、軟X線、顕微鏡