The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

16. Amorphous and Microcrystalline Materials » 16.1 Fundamental properties and their evaluation in disordered materials

[28a-A3-1~9] 16.1 Fundamental properties and their evaluation in disordered materials

Thu. Mar 28, 2013 10:00 AM - 12:30 PM A3 (K1 2F-201)

[28a-A3-7] Behavior of hydrogen in amorphous silicon thin films

○Takashi Imazawa1, Keisuke Nakamura1 (Mitsubishi Electric Corp.1)

Keywords:非晶質シリコン、膜中水素