[28a-A4-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

[28a-A4-8] ▲Formation of a-Si:H Films by Liquid-source Vapor Deposition under Atmospheric Pressure (Formation Mechanism)

^○Zhongrong Shen^1,2, Takashi Masuda^1,3, Hideyuki Takagishi^1,2, Lam Pham Tien^1,2, Keisuke Ohdaira^1,2, Tatsuya Shimoda^1,2,3 (JAIST¹, JST-ALCA², JST-ERATO³)

Keywords:amorphous silicon film