[28a-D3-1~10] 6.1 Ferroelectric thin films

[28a-D3-5] Preparation of epitaxial BiFeO₃ thin film by RF planar magnetron sputtering (III)

^○Tomohisa Uchida¹, Yusuke Takada¹, Taiki Ito¹, Yuya Enomoto¹, Kengo Kidena¹, Seiji Nakashima¹, Hironori Fujisawa¹, Masafumi Kobune¹, Osami Sakata², Yoshio Katsuya², Masaru Shimizu¹ (Univ. of Hyogo¹, NIMS/SPring-8²)

Keywords:BiFeO3、multiferroic