[28a-G10-1~11] 17.4 Device application

[28a-G10-10] △Electrical Resistivity Measurements of Layer Number Determined Multilayer Graphene for Future LSI 3D-Interconnects

^○Kazuyuki Ito¹, Masayuki Katagiri², Tadashi Sakai², Yuji Awano¹ (Keio Univ.¹, LEAP²)

Keywords:グラフェン、配線、抵抗率