[28a-G17-1~11] 12.7 Biological and medical engineering, biochips

[28a-G17-10] Ionic Current Measurement of Gate Controlled Ionic Transport Nanofluidic Channel Fabricated by Silicon Planar Process

^○Junpei Nishimoto¹, Kazuhiro Takahashi^1,2, Yoshinaga Uemura¹, Kazuya Atsumi¹, Toshiaki Hattori¹, Masato Futagawa¹, Koichi Okumura¹, Makoto Ishida¹, Kazuaki Sawada^1,2 (Toyohashi University of Technology¹, JST CREST²)

Keywords:nanochannel、半導体