[28a-PA2-1~14] 7. Beam Technology and Nanofabrication

[28a-PA2-12] Dependence of catalytic effect of In implanted SiO2 on the film-substrate temperature

^○Satoru Yoshimura¹, Kazumasa Ikuse¹, Masato Kiuchi^{1, 2}, Yoshihiro Nishimoto¹, Makoto Yasuda¹, Akio Baba¹, Satoshi Hamaguchi¹ (Osaka Univ.¹, AIST²)

Keywords:インジウム、触媒