[28p-A10-2~8] Nanoscopic interfacial phenomena in reactive plasma: science and application

[28p-A10-8] Summary : Materials Science of Supercritical Cluster Fluids －Nano-scaled Fluctuation in Plasma Process －

^○Kazuo Terashima¹, Hitoshi Muneoka¹, Keiichirou Urabe¹, Sven Stauss¹ (Univ. Tokyo¹)

Keywords:揺らぎ、超臨界流体、プラズマプロセス