[28p-A3-1~17] 16.1 Fundamental properties and their evaluation in disordered materials

[28p-A3-1] Structure analysis of ITO precursor solution for solution process

^○Yoshitaka Murakami^1,2, Daisuke Hirose¹, Tatsuya Shimoda^1,3 (JAIST¹, JSR², JST-ERATO³)

Keywords:ITO、液体プロセス、質量分析