[28p-A4-4] △Improvement of Sputter Ep-GrowGe by High Temperature Annealing
Keywords:スパッタエピタキシャル、ヘテロエピ成長、アニール
Presentation information
Regular sessions(Oral presentation)
16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells
[28p-A4-1~20] 16.3 Bulk, thin-film and other silicon-based solar cells
Thu. Mar 28, 2013 1:30 PM - 6:45 PM A4 (K1 2F-202)