[28p-B8-1~12] 9.2 Nanowires, nanoparticles

[28p-B8-10] Fabrication of Si nanowire arrays using metal-assisted etching with Au catalyst patterned by anodic aluminum oxide template

^○（M1）Takuya Yamaguchi¹, Tomohiro Shimizu¹, Yoshihiro Tada¹, Shoso Shingubara¹ (Kansai Univ.¹)

Keywords:メタルアシストエッチング、metal assisted、ナノワイヤ