[28p-F2-1~19] 6.3 Oxide-based electronics

[28p-F2-1] Preparations of high resistivity polycrystalline ZnO film controlled on the same substrate by a-axis and c-axis orientation

^○Koichi Haga¹, Naoto Oshima¹, Yoshihiro Takizawa¹, Kunio Yubuta², Toetsu Shisido² (Sendai National College of Tech.¹, IMR, Tohoku Univ.²)

Keywords:配向性制御、酸化亜鉛薄膜、ａ軸配向