The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[28p-F2-1~19] 6.3 Oxide-based electronics

Thu. Mar 28, 2013 2:00 PM - 7:00 PM F2 (E3 3F-303)

[28p-F2-16] Investigation of growth conditions for lithium phosphorus oxynitride thin films

○Akichika Kumatani1, Ryoto Shimizu1, Takeo Ohsawa1, Tohru Suzuki1, Susumu Shiraki1, Taro Hitosugi1 (WPI-AIMR, Tohoku Univ.1)

Keywords:酸化物薄膜