[28p-G20-1~16] Recent status for fabrication and characterization of semiconductor quantum dots

[28p-G20-10] Silicon template processed by SPM oxidation and position control of quantum dot

^○Teppei Sakai¹, Seisuke Nakashima^1,2, Kohki Mukai¹ (Yokohama Nat Univ.¹, RIKEN²)

Keywords:量子ドットの位置制御、SPM陽極酸化、量子回路