[28p-G22-1~19] 15.6 IV-group-based compounds

[28p-G22-1] Impact of sacrificial oxidation on thermally grown SiO₂/4H-SiC(0001) structures

^○Takuji Hosoi¹, Yusuke Uenishi¹, Shuhei Mitani², Yuki Nakano², Takashi Nakamura², Takayoshi Shimura¹, Heiji Watanabe¹ (Osaka Univ.¹, ROHM²)

Keywords:シリコンカーバイド、酸化膜