[28p-G7-2] Three-Dimensional Monte Carlo ion implantation for new material development
Keywords:TCAD
Presentation information
Regular sessions(Oral presentation)
13. Semiconductors A (Silicon) » 13.7 Simulation
[28p-G7-1~13] 13.7 Simulation
Thu. Mar 28, 2013 1:30 PM - 5:00 PM G7 (B5 2F-2201)