[28p-PB4-3] An Observation of Initial Growth Layer of DLC and Atomic Interface of Substrate
Keywords:DLC成長 , DLC 膜, FIM-FEM, 界面
Regular sessions(Poster presentation)
06. Thin Films and Surfaces » 6.5 Surface physics and vacuum
Thu. Mar 28, 2013 4:00 PM - 6:00 PM PB4 (2nd gymnasium)
Keywords:DLC成長 , DLC 膜, FIM-FEM, 界面