[29a-A4-1~11] 16.3 シリコン系太陽電池

[29a-A4-6] ▼Passivation Quality of A SiN_x Single Passivation Layer on Crystalline-Si Prepared by Cat-CVD (10:15 AM ～ 10:30 AM)

^○Cham Thi Trinh¹，Koichi Koyama^1,2，Keisuke Ohdaira¹，Hideki Matsumura^1,2 (JAIST¹，CREST²)

キーワード：Silicon nitride SiNx、Passivation layers、Cat-CVD