[29a-B4-1~11] 5.1 Semiconductor laser, Light emitter / Photodetector

[29a-B4-6] Monolithic Integration of InP-Based Waveguide Photodiodes with MIM Capacitors for Compact Coherent Receiver

^○Ryuji Masuyama¹, Hideki Yagi¹, Naoko Inoue¹, Yutaka Onishi¹, Tomokazu Katsuyama¹, Takehiko Kikuchi¹, Yoshihiro Yoneda¹, Hajime Shoji¹ (Sumitomo Electric Industries, LTD.¹)

Keywords:導波路、フォトダイオード、コヒーレント