[29a-B6-1~10] 1.1 Applied physics in general

[29a-B6-1] △First-Principles Investigation on Glass Polishing Property of Perovskite Oxide Abrasive Grain and Theoretical Design of Alternative Abrasive Grain

^○Nobuki Ozawa¹, Miho Nakamura¹, Kentaro Kawaguchi¹, Takeshi Ishikawa¹, Yuji Higuchi¹, Momoji Kubo¹ (Tohoku Univ.¹)

Keywords:化学機械研磨、第一原理計算