[29a-B7-1~12] 8.5 Plasma nanotechnology

[29a-B7-10] ▼The Effect of Ammonia Pretreatment on the Process of Low-Temperature Carbon Nanotubes Growth

^○（DC）Raman Bekarevich^1,2, Shota Miura¹, Aliaksandar Rahachou², Masaaki Nagatsu¹ (Shizuoka Univ.¹, Homel State Univ.²)

Keywords:carbon nanotubes、microwave excited plasma CVD、ammonia pretreatment