[29a-B7-1~12] 8.5 Plasma nanotechnology

[29a-B7-7] △Plasma synthesis of silicon quantum dot and evaluation of process yields

^○Kesuke Maezono¹, Riku Yamada¹, Ryan Gresback¹, Yi Ding¹, Ken Okazaki¹, Tomohiro Nozaki¹ (Tokyo Tech.¹)

Keywords:プラズマCVD、シリコン量子ドット、太陽電池