[29a-B9-1~12] 8.1 Plasma production and control

[29a-B9-7] Low-Pressure Microwave-Plasma Production without Magnetic Field and Its Application

^○Tomonori Noda¹, Masato Nakabo¹, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT Nagoya Univ.²)

Keywords:マイクロ波プラズマ、低圧環境下